X-ray photoelectron spectroscopy (XPS) is a surface analysis equipment that determines the elemental composition and environment of an element – the oxidation state and the chemical bond of the elements. It will be used for advanced analyses and studies of various materials. It is used for smooth and rough surfaces of thin layers as well as for more complicated powders and fine particles, for the analysis of surface atomic layers of materials with a thickness of a few μm. It enables automatic angular resolution XPS measurement, sample heating and cooling, and deep profiling of organic matter using cluster technology and monoatomic argon ions.
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